Clean Room Temperature And Humidity Range

Relative humidity in a semiconductor cleanroom is typically controlled to a target value somewhere within the 30 to 50 percent range and with tolerances as narrow as 1 percent for some areas such as photolithography or even less for deep ultraviolet processing duv and relaxing to.

Clean room temperature and humidity range.

Clean rooms need a lot of air and usually at a controlled temperature and humidity. These plants generate various gases which can affect sensor elements facts figures about 23 of clean rooms are used for pharmaceutical and biotechnology. Variation in humidity means difficult adjustments in bed temperature. Humidity control is also impor tant at liquid crystal display plants and paint plants.

Usually a fluctuation of 2 degrees celsius is permissible. In general the temperature of a cleanroom should be 21 degrees celsius or 69 8 degrees fahrenheit. The clean room applications range from the fabrication of microscopically small sub assemblies electronic devices and instruments to the increasing demand for more sterility and purity in drugs foods and a germ free atmosphere for medical and biological applications. In this case the durability and accuracy of the humidity sensor is very important.

Now that you have a better understanding of cleanroom guidelines relating to humidity levels let s take a look at standards for cleanroom temperature. If you were to set your temperature at 70 degrees and 50 relative humidity at 68 degrees that would be 55 relative humidity. That translates again into the cost of construction and the cost of operating your clean room. As an example humidity is relative it s relative to the temperature it s at.